• DocumentCode
    1489943
  • Title

    Continuous monitoring in disk drive manufacturing

  • Author

    Query, Charles F.

  • Author_Institution
    Seagate Technol., San Jose, CA, USA
  • Volume
    35
  • Issue
    2
  • fYear
    1999
  • fDate
    3/1/1999 12:00:00 AM
  • Firstpage
    945
  • Lastpage
    949
  • Abstract
    This paper is addressed to the managers of clean rooms that are presently sampling with portable particle counters that are considering upgrading to Continuous Monitoring Systems. The intent is to provide a guide for the creation of in-house continuous monitoring procedures. The topics addressed will include: 1. The role of the system owner and system users; 2. The applicability of the two major types of systems: Manifold and Discrete; 3. The importance of sensor location; 4. Setting limits; 5. Interpreting the data, reports, etc.; 6. Corrective action checklist; 7. Some thoughts on justification, including system expansion and other sensor types
  • Keywords
    clean rooms; disc drives; monitoring; particle counting; clean room; continuous monitoring; disk drive manufacturing; portable particle counter; sampling; sensor; Asia; Computer aided manufacturing; Contamination; Counting circuits; Disk drives; Magnetic recording; Monitoring; Sampling methods; Sensor systems; Temperature sensors;
  • fLanguage
    English
  • Journal_Title
    Magnetics, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9464
  • Type

    jour

  • DOI
    10.1109/20.753813
  • Filename
    753813