DocumentCode
1489975
Title
Tribology development for manufacturing of laser zone textured glass substrates
Author
Wang, Z. ; Suziki, H. ; Takahashi, T. ; Nishimori, K. ; Wu, M. ; Horikawa, J.
Author_Institution
Hoya Corp., San Jose, CA, USA
Volume
35
Issue
2
fYear
1999
fDate
3/1/1999 12:00:00 AM
Firstpage
968
Lastpage
971
Abstract
CO2 laser has been employed for our laser zone texturing directly on glass substrate. Bump feature control on laser textured glass substrate was reported. The relationships between the bump feature and tribology performances have been investigated. Typically for low fly height range, the bump height was arranged from 7 to 20 nm, bump diameter from 5 to 14 μm, bump spacing from 15×15 to 75×75μm. An excellent tribology performance can be achieved at even bump height down to 12 nm
Keywords
aluminosilicate glasses; friction; hard discs; laser beam machining; surface texture; tribology; 15 micron; 5 to 14 micron; 7 to 20 nm; 75 micron; CO2; bump diameter; bump feature control; bump height; bump spacing; fly height range; laser zone texturing; tribology development; Cascading style sheets; Electric shock; Glass manufacturing; Laser transitions; Magnetic heads; Optical control; Optical pulse shaping; Shape control; Testing; Tribology;
fLanguage
English
Journal_Title
Magnetics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9464
Type
jour
DOI
10.1109/20.753817
Filename
753817
Link To Document