Precision positioning using a microfabricated electrostatic actuator

Author

Horsley, David A. ; Wongkomet, Naiyavudhi ; Horowitz, Roberto ; Pisano, Albert P.

Author_Institution

Berkeley Sensor & Activator Center, California Univ., Berkeley, CA, USA

Volume

35

Issue

2

fYear

1999

fDate

3/1/1999 12:00:00 AM

Firstpage

993

Lastpage

999

Abstract

This paper presents a microfabricated actuator designed for high precision servo-positioning in a magnetic hard disk drive. The device is actuated using electrostatic force generated with parallel-plate capacitive electrodes. The displacement of these electrodes is measured using a dedicated capacitive sensing interface, allowing closed-loop control to be used to extend the servo bandwidth. Using the sensing electronics and a simple phase-lead compensator, a prototype device was used to actuate a 1.6 mg ceramic slider over a 1.2 kHz bandwidth. Using optical position measurements, the same actuator was used to achieve a 2.5 kHz bandwidth

Keywords

closed loop systems; compensation; disc drives; electrostatic actuators; hard discs; position control; servomechanisms; 1.2 kHz; 2.5 kHz; ceramic slider; closed-loop control; dedicated capacitive sensing interface; electrostatic force; microfabricated electrostatic actuator; optical position measurements; parallel-plate capacitive electrodes; phase-lead compensator; precision positioning; sensing electronics; servo bandwidth; servo-positioning; Actuators; Bandwidth; Ceramics; Displacement control; Displacement measurement; Electrodes; Electrostatic measurements; Hard disks; Prototypes; Servomechanisms;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/20.753822

Filename

753822