Large rotation angle micromirror based on hypocycloidal electrothermal actuators

Author

Xu, Yan ; Singh, Jaskirat ; Chen, Ni

Author_Institution

Inst. of Microelectron., A*STAR (Agency for Sci., Technol. & Res.), Singapore, Singapore

Volume

46

Issue

10

fYear

2010

Firstpage

704

Lastpage

706

Abstract

A large rotation angle micromirror using hypocycloidal electrothermal actuators (HEAs) is presented. The mechanical rotation angle of the micromirror is ~35?? at 2.6 V in nonresonant mode. The Cr/Au coated square mirror plate is supported by two groups of HEAs in order to achieve single axis rotation. Four Al/Si bimorph structures are staggerly connected in parallel to form a HEA. This structure is experimentally demonstrated to increase the deflection angle. Moreover, the rotation axis keeps still and there is no lateral shifting effect. The -3 dB cutoff frequency was found to be about 29 Hz as the large signal frequency response.

Keywords

aluminium; chromium; electric actuators; finite element analysis; gold; micromirrors; silicon; Al-Si; Cr-Au; bimorph structure; coated square mirror plate; cutoff frequency; deflection angle; finite element analysis; hypocycloidal electrothermal actuators; large rotation angle micromirror; lateral shifting effect; nonresonant mode; signal frequency response; voltage 2.6 V;

fLanguage

English

Journal_Title

Electronics Letters

Publisher

iet

ISSN

0013-5194

Type

jour

DOI

10.1049/el.2010.0493

Filename

5466355