Title :
High-performance bottom electrode organic thin-film transistors
Author :
Kymissis, Ioannis ; Dimitrakopoulos, C.D. ; Purushothaman, Sampath
Author_Institution :
Microsystems Technol. Lab., MIT, Cambridge, MA, USA
fDate :
6/1/2001 12:00:00 AM
Abstract :
Pentacene-based organic field effect transistors (FETs) exhibit enormous potential as active elements in a number of applications. One significant obstacle to commercial application remains: no completely lithographic process exists for forming high-performance devices. Processing constraints prevent electrodes from being lithographically patterned once the semiconductor is deposited, but depositing the electrodes before the semiconductor leads to low-performance transistors. By using self-assembled monolayers (SAMs) to change the surface energy of the metal electrodes and morphology of the pentacene subsequently grown on the electrodes, high-performance transistors may be formed using a process compatible with lithographic definition of the source and drain electrodes
Keywords :
monolayers; organic semiconductors; photolithography; thin film transistors; SAMs; active elements; bottom electrode organic thin-film transistors; lithographic definition; lithographic process; metal electrodes; photolithography; self-assembled monolayers; surface energy; Design optimization; Dielectric materials; Electrodes; FETs; Laboratories; Organic thin film transistors; Pentacene; Semiconductor films; Semiconductor materials; Thin film transistors;
Journal_Title :
Electron Devices, IEEE Transactions on