Title :
Terahertz time-domain spectroscopy of films fabricated from SU-8
Author :
Arscott, S. ; Garet, F. ; Mounaix, P. ; Duvillaret, L. ; Coutaz, J.-L. ; Lippens, D.
Author_Institution :
Inst. d´´Electron. et de Microelectron., Univ. des Sci. et Tech. de Lille Flandres Artois, Villeneuve d´´Ascq, France
fDate :
2/4/1999 12:00:00 AM
Abstract :
Terahertz time-domain spectroscopy has been used to characterise the refractive index and absorption coefficient of samples fabricated using the negative photoresist SU-8, in the frequency range 0.1-1.6 THz. At a frequency of 1 THz, the corresponding dielectric constant and dielectric loss tangent are 2.9 and 6.3×10-6, respectively
Keywords :
absorption coefficients; dielectric losses; permittivity; photoresists; polymer films; refractive index; submillimetre wave spectra; 0.1 to 1.6 THz; SU-8 negative photoresist; THF; absorption coefficient; dielectric constant; dielectric loss tangent; refractive index; terahertz time-domain spectroscopy;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19990146
