Multimodal Sensor for Simultaneous Proton and Light Sensing Using a Hole and Electron Accumulation Technique

Author

Nakazawa, Hirokazu ; Watanabe, Hiroto ; Ishida, Makoto ; Sawada, Kazuaki

Author_Institution

Integrated Circuit & Sensor Syst. Group, Toyohashi Univ. of Technol., Toyohashi, Japan

Volume

59

Issue

6

fYear

2012

fDate

6/1/2012 12:00:00 AM

Firstpage

1780

Lastpage

1785

Abstract

A novel multimodal biosensor based on complementary metal-oxide-semiconductor technology is presented. In the sensor, electrons and holes are simultaneously handled as signal electrical charges. We call this technique the hole and electron accumulation technique (HEAT). The HEAT sensor maps two phenomena (i.e., ion concentration and light power) perfectly at the same time using the same pixel. This paper describes the sensing mechanism and basic characteristics of the HEAT sensor. In addition, we successfully demonstrate a multimodal sensor for the simultaneous sensing of pH (power of hydrogen or proton concentration) and light power.

Keywords

CMOS integrated circuits; biosensors; optical self-focusing; optical sensors; HEAT sensor; complementary metal-oxide-semiconductor technology; hole and electron accumulation technique; light sensing; multimodal biosensor; proton sensing; Capacitance; Charge carrier processes; Electric potential; Heating; Optical sensors; Silicon; Biosensors; complementary metal–oxide–semiconductor (CMOS) integrated circuits; multimodal sensors; optical sensors;

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

jour

DOI

10.1109/TED.2012.2191788

Filename

6183506