Title :
Pulsewidth modulation technique for sampling electrostatic force microscopy
Author_Institution :
Dept. of Electr. Eng., United Arab Emirates Univ., Al-Ain, United Arab Emirates
fDate :
3/18/1999 12:00:00 AM
Abstract :
A new sampling electrostatic force microscopy technique for noninvasive measurement of microelectronic circuits is presented. The technique utilises a pulsewidth modulated sampling signal at the probe end to enable internal voltage measurement. Unlike previous sampling methods, the presented technique does not require broadband elements
Keywords :
electrostatic devices; integrated circuit measurement; integrated circuit testing; pulse width modulation; signal sampling; voltage measurement; internal voltage measurement; microelectronic circuits; noninvasive measurement; probe end; pulsewidth modulation technique; sampling electrostatic force microscopy; sampling signal;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19990329
