Simulation and design of AIN piezoelectric resonator for infrared sensing application utilizing lamb wave mode

Author

Wan Chia Ang ; Kropelmcki, Piotr ; Randles, A.B. ; Gu, Yuandong Alex ; Kam Chew Leong ; Chuan Seng Tan

Author_Institution

Inst. of Microelectron., Agency for Sci., Technol. & Res. (A*STAR), Singapore, Singapore

fYear

2014

fDate

21-24 April 2014

Firstpage

1

Lastpage

6

Abstract

This paper describes the operation principle and design of a CMOS compatible and high temperature capable AIN-based piezoelectric resonant uncooled infrared detector. The A1N piezoelectric resonator is designed to operate at hundreds megahertz frequencies in Lamb wave mode or contour extensional. The design parameters include IDT electrode fingers and A1N piezoelectric film dimension. The performance of different structure designs of the A1N resonator are compared in ANSYS and COMSOL simulation tool.

Keywords

CMOS integrated circuits; III-V semiconductors; aluminium compounds; computerised instrumentation; electrochemical electrodes; infrared detectors; integrated circuit design; piezoelectric thin films; surface acoustic wave resonators; surface acoustic wave sensors; thin film sensors; wide band gap semiconductors; ANSYS simulation tool; AlN; CMOS design; COMSOL simulation tool; IDT electrode finger; infrared sensing application; lamb wave mode; piezoelectric film dimension; piezoelectric resonant uncooled infrared detector; Conferences; Decision support systems; Information processing; Intelligent sensors; ANSYS; COMSOL; Lamb wave mode; aluminium nitride; piezoelectric resonator; uncooled infrared detector;

fLanguage

English

Publisher

ieee

Conference_Titel

Intelligent Sensors, Sensor Networks and Information Processing (ISSNIP), 2014 IEEE Ninth International Conference on

Conference_Location

Singapore

Print_ISBN

978-1-4799-2842-2

Type

conf

DOI

10.1109/ISSNIP.2014.6827633

Filename

6827633