Electroplated Ni-CNT Nanocomposite for Micromechanical Resonator Applications

Author

Lee, Yi-Chia ; Li, Ming-Huang ; Cheng, Y.T. ; Hsu, Wensyang ; Li, Sheng-Shian

Author_Institution

Dept. of Mech. Eng., Nat. Chiao Tung Univ., Hsinchu, Taiwan

Volume

33

Issue

6

fYear

2012

fDate

6/1/2012 12:00:00 AM

Firstpage

872

Lastpage

874

Abstract

In this letter, electroplated Ni-CNT nanocomposite is synthesized and utilized as a structural material for micromechanical resonator fabrication. Pretreated by sulfate sodium dodecyl, carbon nanotubes (CNTs) disperse well in electrolyte and can be incorporated in an electroplated Ni film. Clamped-clamped beam resonators fabricated using the nanocomposite show 27% resonant frequency enhancement (from 498.75 to 634.72 kHz). Meanwhile, the Q factors of 781 and 760 for Ni and Ni-CNT nanocomposite resonators, which are comparable with the prior art, indicate that the anchor loss could dominate the Q performance of the beam resonators.

Keywords

carbon nanotubes; electroplating; micromechanical resonators; nanocomposites; carbon nanotubes; clamped-clamped beam resonators; electrolyte; electroplated Ni film; electroplated Ni-CNT nanocomposite; micromechanical resonator applications; micromechanical resonator fabrication; structural material; sulfate sodium dodecyl; Carbon nanotubes; Copper; Electrodes; Fabrication; Micromechanical devices; Nickel; Resonant frequency; Electroplated Ni-CNT nanocomposite; microelectromechanical systems (MEMS); quality factor; resonant frequency; resonator;

fLanguage

English

Journal_Title

Electron Device Letters, IEEE

Publisher

ieee

ISSN

0741-3106

Type

jour

DOI

10.1109/LED.2012.2190131

Filename

6184271