Title : 
Study of quarter-micrometre retrograde well: device characteristics against temperature
         
        
            Author : 
Toe-Naing, Swe ; Kiat-Seng, Yeo
         
        
            Author_Institution : 
Sch. of Electr. & Electron. Eng., Nanyang Technol. Inst., Singapore
         
        
        
        
        
            fDate : 
2/18/1999 12:00:00 AM
         
        
        
        
            Abstract : 
A comprehensive study is presented of the effects of temperature and well-implant energy on the performance and short channel characteristics of 0.25 μm pMOSFETs. Tradeoffs between performance and short-channel effects (SCEs) are examined experimentally based on the device on-current (Ion), off-current (Ioff), saturation transconductance (Gm), drain-induced barrier lowering (DIBL), and punch-through effect ratio (ΔS/S%)
         
        
            Keywords : 
MOSFET; doping profiles; ion implantation; semiconductor device measurement; 0.25 micron; DIBL; device characteristics; device offcurrent; device on-current; drain-induced barrier lowering; p-channel MOSFET; pMOSFETs; performance characteristics; punch-through effect ratio; quarter-micrometre retrograde well; saturation transconductance; short channel characteristics; temperature effects; well-implant energy;
         
        
        
            Journal_Title : 
Electronics Letters
         
        
        
        
        
            DOI : 
10.1049/el:19990217