A novel bulk micromachined electrostatic microvalve with a curved-compliant structure applicable for a pneumatic tactile display

Recent success of microelectromechanical systems (MEMS) in projection displays have raised similar expectation for an efficient, low power, affordable, full-page and pneumatic tactile display. Such design has not been achieved by the conventional technology but could bring significant improvement to current refreshable Braille displays. This paper demonstrates a novel bulk-micromachined electrostatic microvalve suitable for a pneumatic tactile display. The microvalve, a silicon perforated diaphragm juxtaposed to a silicon inlet orifice, requires relatively low closing voltage against a large supply differential pressure and flow rate, i.e., 72.9 V-rms for 19.3 kPa and 85 mi/min. Such an attractive characteristic is due to its unique curved-compliant structure that has, unlike other electrostatic microvalves, no tolerance for any initial air gap between its electrodes. As a design tool, a mechanical model of the microvalve is introduced based on the lubrication theory and large plate deflection theory. The model is established on a steady-state coupled field problem of fluid-solid mechanics. Reynolds and von-Karman equations were simultaneously solved for the microvalve geometry by finite difference approximation and double Fourier series expansion. The results of the model and experiments are compared and found to be in good agreement with a relative error less than 10%