Title :
Resonant cavity integrated absorber structure for capacitive infrared detectors
Author :
Kwon, I.W. ; Kim, Dae San ; Kim, Woo Young ; Hwang, C.H. ; Lee, Hee Chul
Author_Institution :
Dept. of Electr. Eng., Korea Adv. Inst. of Sci. & Technol., Daejeon, South Korea
Abstract :
A novel absorption structure for the capacitive infrared (IR) detectors is proposed. By attaching an IR mirror under the absorber at a distance of λ/4, the resonant cavity structure is established, providing a consistent absorptance of 78λ regardless of the absorber position and the device temperature.
Keywords :
capacitive sensors; cavity resonators; infrared detectors; mirrors; IR mirror; absorber position; capacitive infrared detectors; device temperature; resonant cavity integrated absorber structure;
Journal_Title :
Electronics Letters
DOI :
10.1049/el.2011.0639
