• DocumentCode
    1496826
  • Title

    Resonant cavity integrated absorber structure for capacitive infrared detectors

  • Author

    Kwon, I.W. ; Kim, Dae San ; Kim, Woo Young ; Hwang, C.H. ; Lee, Hee Chul

  • Author_Institution
    Dept. of Electr. Eng., Korea Adv. Inst. of Sci. & Technol., Daejeon, South Korea
  • Volume
    47
  • Issue
    8
  • fYear
    2011
  • Firstpage
    497
  • Lastpage
    499
  • Abstract
    A novel absorption structure for the capacitive infrared (IR) detectors is proposed. By attaching an IR mirror under the absorber at a distance of λ/4, the resonant cavity structure is established, providing a consistent absorptance of 78λ regardless of the absorber position and the device temperature.
  • Keywords
    capacitive sensors; cavity resonators; infrared detectors; mirrors; IR mirror; absorber position; capacitive infrared detectors; device temperature; resonant cavity integrated absorber structure;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el.2011.0639
  • Filename
    5751792
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1496826