Electrooptic polymer modulators operating in both TE and TM modes incorporating a vertically tapered cladding

We propose a modified electrooptic (EO) PMMA polymer waveguide structure supporting both TE and TM modes in spite of the large birefringence induced by the poling. A vertically tapered structure is employed to connect a single-mode rib waveguide and a confinement-enhanced rectangular buried waveguide. This waveguide structure can be easily fabricated by a two-step reactive ion etching (RIE) process with a shadow mask. To demonstrate TE/TM confinement and single-mode operation, Mach-Zehnder intensity modulators are fabricated by incorporating the proposed waveguide structure. The extinction ratio is better than -15 dB, which proves the single-mode operation. Half-wave voltages for TM and TE modes are 6 and 24 V, respectively.