DocumentCode
1497938
Title
System Integration Challenges for a Slider With an Integrated Microactuator
Author
Hoheisel, Dominik ; Cvetkovic, Srecko ; Kurniawan, Willyanto ; Obermeier, Ernst ; Gatzen, Hans H.
Author_Institution
Produktionstechnisches Zentrum, Leibniz Univ. Hannover, Garbsen, Germany
Volume
46
Issue
6
fYear
2010
fDate
6/1/2010 12:00:00 AM
Firstpage
2163
Lastpage
2166
Abstract
To develop a system integration process for a slider with an integrated microactuator (SLIM), quite a few challenges had to be resolved. They include processes for double rowbar stacking and thinning, chiplet mounting, slider separation, and chiplet cross crown fabrication, to name just a few. The slider separation process is particularly challenging: during this process, the mounting bars suspended on thin Si leaf springs are released. This paper discusses the challenges encountered and the system integration solutions developed.
Keywords
hard discs; microactuators; Si; chiplet cross crown fabrication; chiplet mounting; double rowbar stacking; integrated microactuator; slider separation; system integration; thin Si leaf; thinning; Bars; Electromagnets; Fabrication; Insulation life; Microactuators; Micromagnetics; Separation processes; Silicon on insulator technology; Springs; Stacking; Electromagnetic microactuator; hard disc drive;
fLanguage
English
Journal_Title
Magnetics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9464
Type
jour
DOI
10.1109/TMAG.2010.2040373
Filename
5467387
Link To Document