Surface Characterization and Lubricant Performance on Amorphous Carbon Films Irradiated With Gas Cluster Ion Beams

Author

Toyoda, Noriaki ; Yamada, Isao ; Tani, Hiroshi ; Sakane, Yasuo

Author_Institution

Grad. Sch. of Eng., Univ. of Hyogo, Himeji, Japan

Volume

46

Issue

6

fYear

2010

fDate

6/1/2010 12:00:00 AM

Firstpage

1464

Lastpage

1466

Abstract

Irradiations of gas cluster ion beams (GCIB) on amorphous carbon films formed with chemical vapor deposition (CVD) were performed, and the affinity with lubricant was studied. The surface roughness of as-deposited amorphous CVD carbon film was improved with N₂ -GCIB irradiation. By reducing the formation of multiply charged cluster ions, large crater formations can be minimized, which helps to obtain smooth surface. It was also shown that nitrogen rich surface was formed on the amorphous CVD carbon with N₂ -GCIB. From the study of lubricant affinity and the surface free energy measurements, nitrogen containing functional groups were formed with N₂-GCIB irradiation, as a result, adhesion between the lubricant and the amorphous CVD carbon film increased.

Keywords

amorphous magnetic materials; carbon; chemical vapour deposition; free energy; ion beams; lubricants; surface roughness; thin films; CVD; GCIB; amorphous carbon films; chemical vapor deposition; gas cluster ion beams; lubricant affinity; lubricant performance; nitrogenation; surface characterization; surface free energy measurements; surface roughness; Amorphous materials; Argon; Atomic layer deposition; Ion beams; Lubricants; Magnetic films; Nitrogen; Rough surfaces; Surface morphology; Surface roughness; Amorphous carbon; gas cluster ion beam; lubricant affinity; nitrogenation;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/TMAG.2010.2042036

Filename

5467406