High-Quality Factor Ni-Zn Ferrite Planar Inductor

Author

Lee, Jae-Jin ; Hong, Yang-Ki ; Bae, Seok ; Park, Ji-Hoon ; Jalli, Jeevan ; Abo, Gavin S. ; Syslo, Ryan ; Choi, Byoung-Chul ; Donohoe, Gregory W.

Author_Institution

Dept. of Electr. & Comput. Eng., Univ. of Alabama, Tuscaloosa, AL, USA

Volume

46

Issue

6

fYear

2010

fDate

6/1/2010 12:00:00 AM

Firstpage

2417

Lastpage

2420

Abstract

Ferrite and air-core planar inductor arrays were fabricated on 4 inch Si wafer to characterize inductor performance. Three micron thick Ni_0.5Zn_0.5Fe₂O₄ film was deposited by a low temperature electrophoresis ferrite deposition process. All ferrite inductors in the array showed 35% higher inductance (L) and 130% higher quality factor (Q) than air-core inductor. The maximum Q of ferrite inductor was found to be 53 at 2 MHz. The superimposed DC current and the rated power were measured to be about 3 A and 15 W, respectively, for a 5% drop in L. The fabricated ferrite inductor has a higher current capability than the air-core inductor. In addition, the power efficiency of the buck DC-DC converter was predicted to be 94.3% at 1.93 W.

Keywords

DC-DC power convertors; Q-factor; electrodeposition; electrophoresis; ferrites; magnetic thin film devices; nickel compounds; thin film inductors; zinc compounds; Ni_0.5Zn_0.5Fe₂O₄; Si; air-core planar inductor arrays; buck DC-DC converter; ferrite planar inductor arrays; frequency 2 MHz; inductance; low temperature electrophoresis ferrite deposition; power 1.93 W; power efficiency; quality factor; superimposed DC current; Current measurement; Electrokinetics; Ferrite films; Inductance; Inductors; Iron; Power measurement; Q factor; Temperature; Zinc; Current capability; DC–DC converter; Ni-Zn ferrite; electrophoresis deposition; electrophoresis ferrite deposition (EPD); planar inductor;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/TMAG.2010.2044377

Filename

5467438