DocumentCode
1498535
Title
New ratio method for effective channel length and threshold voltage extraction in MOS transistors
Author
Cretu, B. ; Boutchacha, T. ; Ghibaudo, G. ; Balestra, F.
Author_Institution
Lab. de Phys. des Composants a Semicond., ENSERG, Grenoble, France
Volume
37
Issue
11
fYear
2001
fDate
5/24/2001 12:00:00 AM
Firstpage
717
Lastpage
719
Abstract
A new `ratio´ method for effective channel length and threshold voltage extraction in MOS transistors is proposed. The method, which relies on the same function as that used in the well known shift and ratio procedure, enables the effective channel length and threshold voltage difference to be extracted from simple linear regression applied to a short versus long channel correlation plot of the function Y(Vg)=Id√gm (Id being the drain current and gm the transconductance). This method has successfully been applied to 0.18-0.1 μm CMOS technologies
Keywords
CMOS integrated circuits; MOSFET; length measurement; semiconductor device measurement; voltage measurement; 0.18 to 0.1 mum; CMOS technologies; MOS transistors; drain current; effective channel length; linear regression; ratio method; short versus long channel correlation plot; threshold voltage; transconductance);
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:20010467
Filename
926463
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