DocumentCode
1498834
Title
Evidence for the Fourfold-Valley Confinement Electron Piezo-Effective-Mass Coefficient in Inversion Layers of
Uniaxial-Tensile-Strained (001)
Author
Chen, Ming-Jer ; Lee, Wei-Han
Author_Institution
Dept. of Electron. Eng., Nat. Chiao Tung Univ., Hsinchu, Taiwan
Volume
33
Issue
6
fYear
2012
fDate
6/1/2012 12:00:00 AM
Firstpage
755
Lastpage
757
Abstract
We have recently experimentally extracted the piezo-effective-mass coefficients of 2-D electrons via the gate tunneling current of (001) n-channel metal-oxide-semiconductor field-effect transistors under 〈110〉 uniaxial compressive stress. The results pointed to the existence of a piezo-effective-mass coefficient around the fourfold conduction-band valley in the out-of-plane (quantum confinement) direction. To strengthen this further, here, we provide extra evidence. First, explicit guidelines are drawn to distinguish all the piezo-effective-mass coefficients. Then, a self-consistent strain quantum simulation is executed to fit literature data of both the mobility enhancement and gate current suppression in the uniaxial tensile stress situation. It is found that neglecting the fourfold-valley out-of-plane piezo-effective-mass coefficient, as in existing band structure calculations, only leads to a poor fitting.
Keywords
MOSFET; piezoelectric devices; 2D electrons; fourfold conduction-band valley; fourfold-valley confinement electron piezoeffective-mass coefficient; fourfold-valley out-of-plane piezoeffective-mass coefficient; gate current suppression; gate tunneling current; inversion layers; n-channel metal-oxide-semiconductor field-effect transistors; out-of-plane direction; piezoeffective-mass coefficients; self-consistent strain quantum simulation; uniaxial compressive stress; uniaxial tensile stress situation; uniaxial-tensile-strained nMOSFET; Logic gates; MOSFETs; Silicon; Strain; Tensile stress; Tunneling; Band structure; effective mass; mechanical stress; metal–oxide–semiconductor field-effect transistors (MOSFETs); mobility; model; simulation; strain; tunneling;
fLanguage
English
Journal_Title
Electron Device Letters, IEEE
Publisher
ieee
ISSN
0741-3106
Type
jour
DOI
10.1109/LED.2012.2190579
Filename
6186766
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