• DocumentCode
    1498834
  • Title

    Evidence for the Fourfold-Valley Confinement Electron Piezo-Effective-Mass Coefficient in Inversion Layers of \\langle \\hbox {110}\\rangle Uniaxial-Tensile-Strained (001)

  • Author

    Chen, Ming-Jer ; Lee, Wei-Han

  • Author_Institution
    Dept. of Electron. Eng., Nat. Chiao Tung Univ., Hsinchu, Taiwan
  • Volume
    33
  • Issue
    6
  • fYear
    2012
  • fDate
    6/1/2012 12:00:00 AM
  • Firstpage
    755
  • Lastpage
    757
  • Abstract
    We have recently experimentally extracted the piezo-effective-mass coefficients of 2-D electrons via the gate tunneling current of (001) n-channel metal-oxide-semiconductor field-effect transistors under 〈110〉 uniaxial compressive stress. The results pointed to the existence of a piezo-effective-mass coefficient around the fourfold conduction-band valley in the out-of-plane (quantum confinement) direction. To strengthen this further, here, we provide extra evidence. First, explicit guidelines are drawn to distinguish all the piezo-effective-mass coefficients. Then, a self-consistent strain quantum simulation is executed to fit literature data of both the mobility enhancement and gate current suppression in the uniaxial tensile stress situation. It is found that neglecting the fourfold-valley out-of-plane piezo-effective-mass coefficient, as in existing band structure calculations, only leads to a poor fitting.
  • Keywords
    MOSFET; piezoelectric devices; 2D electrons; fourfold conduction-band valley; fourfold-valley confinement electron piezoeffective-mass coefficient; fourfold-valley out-of-plane piezoeffective-mass coefficient; gate current suppression; gate tunneling current; inversion layers; n-channel metal-oxide-semiconductor field-effect transistors; out-of-plane direction; piezoeffective-mass coefficients; self-consistent strain quantum simulation; uniaxial compressive stress; uniaxial tensile stress situation; uniaxial-tensile-strained nMOSFET; Logic gates; MOSFETs; Silicon; Strain; Tensile stress; Tunneling; Band structure; effective mass; mechanical stress; metal–oxide–semiconductor field-effect transistors (MOSFETs); mobility; model; simulation; strain; tunneling;
  • fLanguage
    English
  • Journal_Title
    Electron Device Letters, IEEE
  • Publisher
    ieee
  • ISSN
    0741-3106
  • Type

    jour

  • DOI
    10.1109/LED.2012.2190579
  • Filename
    6186766