Title :
Selective electroless plating-A new technique for GaAs MMICs
Author :
Choudhury, Debabani ; Bhatgadde, L.G. ; Mahapatra, S.
Author_Institution :
Indian Inst. of Technol., Bombay, India
fDate :
2/1/1991 12:00:00 AM
Abstract :
A simple, cost-effective processing technique, selective electroless plating, is proposed for GaAs monolithic microwave integrated circuits (MMICs). Microwave measurements show that the attenuation properties of transmission lines fabricated by this processing technique are comparable to the attenuation properties of lines fabricated by the traditional evaporation lift-off technique
Keywords :
III-V semiconductors; MMIC; electroless deposition; gallium arsenide; integrated circuit manufacture; metallisation; strip lines; waveguides; CPW; GaAs; MMICs; attenuation properties of transmission lines; coplanar waveguide; cost-effective processing technique; microstrip lines; microwave properties; monolithic microwave integrated circuits; selective electroless plating; semiconductor; Attenuation measurement; Distributed parameter circuits; Gallium arsenide; Integrated circuit measurements; MMICs; Microwave integrated circuits; Microwave measurements; Microwave theory and techniques; Monolithic integrated circuits; Transmission line measurements;
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
