DocumentCode
1499301
Title
Active Matrix Color-LCD on 75 
m Thick Flexible Glass Substrates
Author
Hoehla, Steffen ; Garner, Sean ; Hohmann, Michael ; Kuhls, Oliver ; Li, Xinghua ; Schindler, Axel ; Fruehauf, Norbert
Author_Institution
Inst. for Large Area Microelectron., Univ. Stuttgart, Stuttgart, Germany
Volume
8
Issue
6
fYear
2012
fDate
6/1/2012 12:00:00 AM
Firstpage
309
Lastpage
316
Abstract
We have demonstrated a full color 4-in quarter-VGA amorphous silicon active-matrix (AM) LCD (AM-LCD) with 75 μm thick flexible glass backplane and frontplane substrates. The device was built directly on the flexible glass without using a processing carrier or additional protective layers. The overall thickness of the LC cell is <; 170 μ m. Process modifications were made to accommodate the flexibility and reduced thickness of the substrate. These process changes were related to: thin film deposition, photolithography, cell assembly and filling, glass scribing, and driver bonding. The achieved results indicate that the incorporated flexible glass substrates are compatible with the fabrication of high quality color AM-LCDs.
Keywords
amorphous semiconductors; colour displays; driver circuits; elemental semiconductors; glass; liquid crystal displays; photolithography; silicon; thin film transistors; Si; cell assembly; cell filling; driver bonding; full color 4-in quarter-VGA amorphous silicon active-matrix color-LCD; glass scribing; high quality color AM-LCD fabrication; photolithography; process modification; protective layer; size 75 mum; thick flexible glass backplane substrate thickness; thick flexible glass frontplane substrate thickness; thin film deposition; Assembly; Backplanes; Fabrication; Glass; Stress; Substrates; Thin film transistors; aSi:H-TFTs; active-matrix (AM)-LCD; flexible glass substrates;
fLanguage
English
Journal_Title
Display Technology, Journal of
Publisher
ieee
ISSN
1551-319X
Type
jour
DOI
10.1109/JDT.2011.2178393
Filename
6186843
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