Title :
SOI Substrate Removal for SEE Characterization: Techniques and Applications
Author :
Shaneyfelt, Marty R. ; Schwank, James R. ; Dodd, Paul E. ; Stevens, Jeffrey ; Vizkelethy, Gyorgy ; Swanson, Scot E. ; Dalton, Scott M.
Author_Institution :
Sandia National Laboratories, Albuquerque, NM, USA
Abstract :
Techniques for removing the back substrate of SOI devices are described for both packaged devices and devices at the die level. The use of these techniques for microbeam, heavy-ion, and laser testing are illustrated.
Keywords :
Contamination; Etching; Gold; Silicon; Substrates; Testing; Heavy-ion testing; laser testing; microbeam testing; substrate removal;
Journal_Title :
Nuclear Science, IEEE Transactions on
DOI :
10.1109/TNS.2012.2189247
