• DocumentCode
    1500028
  • Title

    Spatial resolution limit for the investigation of high-Tc films by low temperature scanning electron microscopy

  • Author

    Gross, R. ; Hartmann, M. ; Hipler, K. ; Huebener, R.P. ; Kober, F. ; Koelle, D.

  • Author_Institution
    Phys. Inst. Lehrstuhl Experimentalphys. II, Tubingen Univ., West Germany
  • Volume
    25
  • Issue
    2
  • fYear
    1989
  • fDate
    3/1/1989 12:00:00 AM
  • Firstpage
    2250
  • Lastpage
    2253
  • Abstract
    Low-temperature scanning electron microscopy represents a promising technique for studying the local superconducting properties of high-Tc films. The spatial and temporal structure of the electron-beam-induced thermal perturbation of high-Tc films and the resulting spatial resolution limit are discussed. Typical examples illustrating the imaging technique are presented
  • Keywords
    electron beam effects; high-temperature superconductors; scanning electron microscope examination of materials; superconducting thin films; electron-beam-induced thermal perturbation; films; high temperature superconductors; low temperature scanning electron microscopy; spatial resolution limit; Conductive films; Electron beams; Equations; Spatial resolution; Substrates; Superconducting films; Superconducting materials; Temperature distribution; Thermal conductivity; Thermal resistance;
  • fLanguage
    English
  • Journal_Title
    Magnetics, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9464
  • Type

    jour

  • DOI
    10.1109/20.92756
  • Filename
    92756
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1500028