Title :
Spatial resolution limit for the investigation of high-Tc films by low temperature scanning electron microscopy
Author :
Gross, R. ; Hartmann, M. ; Hipler, K. ; Huebener, R.P. ; Kober, F. ; Koelle, D.
Author_Institution :
Phys. Inst. Lehrstuhl Experimentalphys. II, Tubingen Univ., West Germany
fDate :
3/1/1989 12:00:00 AM
Abstract :
Low-temperature scanning electron microscopy represents a promising technique for studying the local superconducting properties of high-Tc films. The spatial and temporal structure of the electron-beam-induced thermal perturbation of high-Tc films and the resulting spatial resolution limit are discussed. Typical examples illustrating the imaging technique are presented
Keywords :
electron beam effects; high-temperature superconductors; scanning electron microscope examination of materials; superconducting thin films; electron-beam-induced thermal perturbation; films; high temperature superconductors; low temperature scanning electron microscopy; spatial resolution limit; Conductive films; Electron beams; Equations; Spatial resolution; Substrates; Superconducting films; Superconducting materials; Temperature distribution; Thermal conductivity; Thermal resistance;
Journal_Title :
Magnetics, IEEE Transactions on
