Title :
Optical scanners realized by surface-micromachined vertical torsion mirror
Author :
Su, Guo-Dung John ; Shi-Sheng Lee ; Wu, M.C.
Author_Institution :
Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA
fDate :
5/1/1999 12:00:00 AM
Abstract :
We report on a novel vertical torsion mirror fabricated by surface-micromachining for optical scanner applications. Driven by an electrostatic actuator, the scanning mirror has a resonant frequency of 0.5 kHz and an optical scan range of 26/spl deg/. The maximum achievable number of resolvable spots for this 300 μm×250 μm scanner is 238.
Keywords :
micromachining; mirrors; optical fabrication; optical resolving power; optical scanners; electrostatic actuator; maximum achievable number; optical scan range; optical scanner applications; optical scanners; resolvable spots; resonant frequency; scanning mirror; surface-micromachined vertical torsion mirror; surface-micromachining; vertical torsion mirror fabrication; Costs; Electrodes; Electrostatic actuators; Fasteners; Micromachining; Micromechanical devices; Micromirrors; Mirrors; Resonant frequency; Self-assembly;
Journal_Title :
Photonics Technology Letters, IEEE
