Title :
Fabrication and interface reaction of Y-Ba-Cu-O superconducting thin films by reactive ion beam coating
Author :
Ren, C.X. ; Chen, G.L. ; Zheng, Y. ; Chen, J.M. ; Yang, J. ; Zhang, C.S. ; Xie, L.M. ; Zou, S.C.
Author_Institution :
Ion Beam Lab., Shanghai Inst. of Metall., Acad. Sinica, China
fDate :
3/1/1989 12:00:00 AM
Abstract :
Y-Ba-Cu-O superconducting thin films have been fabricated by the reactive ion beam coating technique with good reproducibility. The influence of atom stoichiometry on the critical temperatures of the films is determined. Ba and Cu atoms diffusing into substrates were detected by auger electron spectroscopy and Rutherford backscattering. A thin silver film deposited on ZrO2 substrate as a buffer layer can effectively retard the interface reaction
Keywords :
Auger effect; Rutherford backscattering; barium compounds; chemical interdiffusion; high-temperature superconductors; ion beam applications; stoichiometry; superconducting thin films; superconducting transition temperature; surface chemistry; vapour deposition; yttrium compounds; Ag; Rutherford backscattering; Y-Ba-Cu-O; ZrO2 substrate; atom stoichiometry; auger electron spectroscopy; buffer layer; critical temperatures; diffusion; fabrication; high temperature superconductors; interface reaction; reactive ion beam coating; reproducibility; superconducting thin films; Atomic layer deposition; Coatings; Fabrication; Ion beams; Reproducibility of results; Substrates; Superconducting films; Superconducting thin films; Temperature; Yttrium barium copper oxide;
Journal_Title :
Magnetics, IEEE Transactions on
