Title :
A simple method for preparing superconducting high Tc thin films
Author :
Romano, P. ; Nigro, A. ; Vaglio, R. ; Signorelli, E. ; Gray, K.E.
Author_Institution :
Dipartimento di Fisica, Salerno Univ., Italy
fDate :
3/1/1989 12:00:00 AM
Abstract :
High-quality superconducting films of the high-Tc compound YBa2Cu3O7 were prepared on sapphire using a simple method that combines DC magnetron sputtering from a single target and evaporation from a heated source. The method should be especially suitable for depositing thin films on complex surfaces. YBa2Cu3O7-δ films with Tc=92 K (onset) were prepared using a YCU3 target and evaporating barium by a specially designed, feedback-controlled, molybdenum heater using either pure barium or barium-aluminum alloy. The films were characterized by X-rays, electron-dispersion spectroscopy, and other techniques
Keywords :
barium compounds; high-temperature superconductors; sputtered coatings; superconducting thin films; yttrium compounds; 92 K; Al2O3-YBa2Cu3O7 ; DC magnetron sputtering; X-ray studies; YBa2Cu3O7; electron-dispersion spectroscopy; evaporation; high temperature superconductors; high-Tc compound; superconducting films; Barium; Coatings; Monitoring; Sputtering; Substrates; Superconducting epitaxial layers; Superconducting magnets; Superconducting thin films; Superconductivity; Testing;
Journal_Title :
Magnetics, IEEE Transactions on
