DocumentCode
1500416
Title
A simple method for preparing superconducting high T c thin films
Author
Romano, P. ; Nigro, A. ; Vaglio, R. ; Signorelli, E. ; Gray, K.E.
Author_Institution
Dipartimento di Fisica, Salerno Univ., Italy
Volume
25
Issue
2
fYear
1989
fDate
3/1/1989 12:00:00 AM
Firstpage
2481
Lastpage
2483
Abstract
High-quality superconducting films of the high-T c compound YBa2Cu3O7 were prepared on sapphire using a simple method that combines DC magnetron sputtering from a single target and evaporation from a heated source. The method should be especially suitable for depositing thin films on complex surfaces. YBa2Cu3O7-δ films with T c=92 K (onset) were prepared using a YCU3 target and evaporating barium by a specially designed, feedback-controlled, molybdenum heater using either pure barium or barium-aluminum alloy. The films were characterized by X-rays, electron-dispersion spectroscopy, and other techniques
Keywords
barium compounds; high-temperature superconductors; sputtered coatings; superconducting thin films; yttrium compounds; 92 K; Al2O3-YBa2Cu3O7 ; DC magnetron sputtering; X-ray studies; YBa2Cu3O7; electron-dispersion spectroscopy; evaporation; high temperature superconductors; high-Tc compound; superconducting films; Barium; Coatings; Monitoring; Sputtering; Substrates; Superconducting epitaxial layers; Superconducting magnets; Superconducting thin films; Superconductivity; Testing;
fLanguage
English
Journal_Title
Magnetics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9464
Type
jour
DOI
10.1109/20.92811
Filename
92811
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