DocumentCode
1500997
Title
Growth of Bulk GaN and AlN: Progress and Challenges
Author
Avrutin, Vitaliy ; Silversmith, Donald J. ; Mori, Yusuke ; Kawamura, F. ; Kitaoka, Y. ; Morkoç, Hadis
Author_Institution
Dept. of Electr. & Comput. Eng., Virginia Commonwealth Univ., Richmond, VA, USA
Volume
98
Issue
7
fYear
2010
fDate
7/1/2010 12:00:00 AM
Firstpage
1302
Lastpage
1315
Abstract
GaN-based optoelectronic and electronic devices such as light-emitting diodes (LEDs), laser, and heterojunction field-effect transistors (HFETs) typically use material grown on foreign substrates such as sapphire, Si, and SiC. However, thermal and lattice mismatch present prevent attainment of quality films deemed necessary by ever increasing demand on device performance. In fact in LEDs intended for solid state lighting, internal quantum efficiencies near 100% might be needed, and further these high efficiencies would have to be retained at very high injection current levels. On the electronic device side, high radio-frequency (RF) power, particularly high-power switching devices, push the material to its limits. Consequently, as has been the case for other successful semiconductor materials systems, native substrates must be developed for the GaN family. In this paper, various approaches such as high-pressure nitrogen solution (HPNS), ammonothermal, and Na flux methods, and an intermediary technique called the hydride vapor phase epitaxy (HVPE; to a lesser extent as there is a review devoted to this technique in this issue) along with their strengths and challenges are discussed.
Keywords
III-V semiconductors; aluminium compounds; gallium compounds; high electron mobility transistors; light emitting diodes; semiconductor epitaxial layers; semiconductor growth; semiconductor lasers; vapour phase epitaxial growth; wide band gap semiconductors; AlN; GaN; LED; Si; Si substrates; SiC; SiC substrates; SiO2; ammonothermal methods; flux methods; heterojunction field-effect transistors; high-pressure nitrogen solution; hydride vapor phase epitaxy; laser; lattice mismatch; light-emitting diodes; optoelectronic devices; sapphire substrates; solid state lighting; thermal mismatch; FETs; Gallium nitride; HEMTs; Heterojunctions; Light emitting diodes; MODFETs; Optical materials; Radio frequency; Semiconductor materials; Substrates; Ammonothermal method; GaN; GaN bulk crystals; Na flux GaN; high-pressure GaN growth;
fLanguage
English
Journal_Title
Proceedings of the IEEE
Publisher
ieee
ISSN
0018-9219
Type
jour
DOI
10.1109/JPROC.2010.2044967
Filename
5471089
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