DocumentCode :
1501220
Title :
Modification of Point-to-Plane DC Discharge During Thin-Film Polymer Treatment
Author :
Svarnas, Panagiotis ; Spyrou, Nicolaos ; Pyrgioti, Eleftheria ; Held, Bernard
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Patras, Patras, Greece
Volume :
39
Issue :
11
fYear :
2011
Firstpage :
2498
Lastpage :
2499
Abstract :
Point-to-plane dc glow discharge has been proposed as an efficient medium for polymer treatment in terms of surface chemistry. However, this discharge is greatly modified when polymer samples are introduced. The study of the differences between the pristine discharge and that with polymer is essential for chemical process optimization. Herein, macroscopic observations by means of photography provide insight to the physical aspects of these differences.
Keywords :
glow discharges; plasma chemistry; plasma materials processing; polymer films; surface chemistry; chemical process optimization; photography; point-to-plane DC glow discharge; pristine discharge; surface chemistry; thin-film polymer treatment; Cathodes; Discharges; Glow discharges; Plasmas; Polymers; Surface discharges; Glow discharges; plasma materials processing; plasma sheaths;
fLanguage :
English
Journal_Title :
Plasma Science, IEEE Transactions on
Publisher :
ieee
ISSN :
0093-3813
Type :
jour
DOI :
10.1109/TPS.2011.2127490
Filename :
5754609
Link To Document :
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