Semi-Analytical Magneto-Mechanic Coupling With Contact Analysis for MEMS/NEMS

Author

Pham Quang, P. ; Delinchant, Benoit ; Coulomb, J.L. ; du Peloux, B.

Author_Institution

G2ELab, Grenoble Electr. Eng. Lab., St. Martin d´Heres, France

Volume

47

Issue

5

fYear

2011

fDate

5/1/2011 12:00:00 AM

Firstpage

922

Lastpage

925

Abstract

This paper presents a methodology and a tool for magnetic and mechanical deformation coupling using numerical and analytical modeling. An analytical magnetic model using Coulombian approach is used and coupled with a mechanical deformation model for a cantilever beam to evaluate contact size and contact force. Such a coupling is not available using numerical solution. This paper details the deformation and contact analysis, which is validated by finite element simulation and also details the coupling approach. Such a modeling is dedicated to an optimization process of magnetic MEMS/NEMS in general and to magnetic nano switch in particular.

Keywords

beams (structures); cantilevers; deformation; finite element analysis; magnetic devices; magnetomechanical effects; mechanical contact; microswitches; nanoelectromechanical devices; optimisation; Coulombian approach; cantilever beam; contact force; contact size; deformation; finite element simulation; magnetic MEMS; magnetic NEMS; magnetic nanoswitch; optimization; semianalytical magneto-mechanic coupling; Couplings; Deformable models; Force; Magnetic analysis; Magnetomechanical effects; Numerical models; Switches; Contact analysis; magnetic switches; magneto mechanic coupling;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/TMAG.2010.2080662

Filename

5754749