Calculation of reactor impedance for helicon discharge

Author

Park, B.H. ; Yoon, N.S. ; Choi, Duk-In

Author_Institution

Dept. of Phys., Korea Adv. Inst. of Sci. & Technol., Seoul, South Korea

Volume

29

Issue

3

fYear

2001

fDate

6/1/2001 12:00:00 AM

Firstpage

502

Lastpage

511

Abstract

We solve the Maxwell-Boltzmann equations and calculate reactor impedance for helicon device with the Nagoya type III antenna using a finite, width modeling of antenna current and inspect the dependence of various components of impedance on discharge parameters. The total resistance is divided into various components such as electron-ion contributions and axial-perpendicular field contributions. Moreover, the total resistance can be approximately expressed as the sum of TG and helicon contributions in a wide range of parameters

Keywords

antennas in plasma; discharges (electric); plasma devices; plasma transport processes; Maxwell-Boltzmann equations; Nagoya type III antenna; antenna current; axial-perpendicular field contributions; discharge parameters; electron-ion contributions; finite width modeling; helicon device; helicon discharge; reactor impedance; total resistance; Antenna accessories; Boundary conditions; Heating; Impedance; Inductors; Maxwell equations; Plasma applications; Plasma devices; Plasma properties; Plasma sources;

fLanguage

English

Journal_Title

Plasma Science, IEEE Transactions on

Publisher

ieee

ISSN

0093-3813

Type

jour

DOI

10.1109/27.928948

Filename

928948