DocumentCode

1503375

Title

Correction to "semiconductor characterization and analytical technology"

Author

Shaffner, Thomas J.

Author_Institution

National Institute of Standards and Technology

Volume

89

Issue

5

fYear

2001

fDate

5/1/2001 12:00:00 AM

Firstpage

789

Lastpage

789

Keywords

Crystalline materials; Diffraction; Equations; Impurities; Kinematics; Lattices; Paper technology; Particle measurements; Position measurement; Silicon;

fLanguage

English

Journal_Title

Proceedings of the IEEE

Publisher

ieee

ISSN

0018-9219

Type

jour

DOI

10.1109/JPROC.2001.929654

Filename

929654