DocumentCode :
1503479
Title :
Bulk-Micromachined VCSEL At 1.55 
m With 76-nm Single-Mode Continuous Tuning Range
Author :
Jatta, S. ; Kögel, B. ; Maute, M. ; Zogal, K. ; Riemenschneider, F. ; Böhm, G. ; Amann, M.-C. ; Meisner, Pascal
Author_Institution :
Opt. Kommun., Tech. Univ. Darmstadt, Darmstadt, Germany
Volume :
21
Issue :
24
fYear :
2009
Firstpage :
1822
Lastpage :
1824
Abstract :
A single-mode continuous tuning range of 76 nm is realized using a bulk-micromachined vertical-cavity surface-emitting laser (VCSEL) operating at wavelengths around 1.55 mum. The bulk-micromachined upper mirror is optimized for dielectric material and manufactured separately from the half-VCSEL. The VCSEL is tuned by an electrothermal actuation of a concave bended membrane. The tuning range characteristics in dependence on the bias of the VCSEL are investigated. It is determined that the tuning range saturates by increasing the current of the VCSEL and a further increase causes a multimode behavior within the tuning range.
Keywords :
dielectric materials; laser cavity resonators; laser mirrors; laser modes; laser tuning; micro-optomechanical devices; micromachining; optical fabrication; semiconductor lasers; surface emitting lasers; MOEMS; bulk micromachined VCSEL; bulk micromachined upper mirror; concave bended membrane; dielectric material; electrothermal actuation; multimode behavior; semiconductor laser; single mode continuous tuning range; vertical cavity surface emitting laser; Bulk-micromachined; dielectric; microelectromechanical systems (MEMS); microoptoelectromechanical system (MOEMS); semiconductor laser; tunable vertical-cavity surface-emitting laser (VCSEL);
fLanguage :
English
Journal_Title :
Photonics Technology Letters, IEEE
Publisher :
ieee
ISSN :
1041-1135
Type :
jour
DOI :
10.1109/LPT.2009.2034272
Filename :
5290154
Link To Document :
