Title :
Hybrid opto-mechanical gyroscope with injection-interferometer readout
Author :
Norgia, M. ; Donati, Silvano
Author_Institution :
Dipartimento di Elettronica, Pavia Univ., Italy
fDate :
6/7/2001 12:00:00 AM
Abstract :
A hybrid micromachined-optoelectronic mechanical system (MOEMS) gyroscope is proposed. It consists of an electrically excited micro-mechanical resonator and an optical readout performed by a laser diode operating as an injection interferometer. An analysis of the system, validated by preliminary experimental results, indicates an attainable performance of 1 deg/h√Hz
Keywords :
gyroscopes; light interferometers; micro-optics; micromachining; micromechanical resonators; microsensors; optical sensors; MOEMS system; electrical excitation; hybrid opto-mechanical gyroscope; injection interferometer; laser diode; micromachined optoelectronic mechanical system; micromechanical resonator; optical readout;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20010520
