DocumentCode
1505390
Title
A low-cost high-performance cleanroom enclosure
Author
Hutchins, J.B. ; Martin, M.D. ; Belolipetskiy, S. ; Cox, H.L., Jr. ; Pitts, W.K. ; Walsh, K.M.
Author_Institution
Dept. of Phys., Louisville Univ., KY, USA
Volume
42
Issue
2
fYear
1999
fDate
5/1/1999 12:00:00 AM
Firstpage
144
Lastpage
146
Abstract
A conventional laboratory room was converted into a cleanroom for laser microfabrication. These simple techniques resulted in a measured class 100 environment at the surface of the optical table, well beyond the class 1000 design goal. The total conversion costs were approximately 40% the cost of a comparable commercial modular cleanroom, sufficiently inexpensive for the development of microfabrication instructional laboratories
Keywords
clean rooms; electronic engineering education; laser beam machining; micromachining; laboratory room; laser microfabrication; low-cost high-performance cleanroom enclosure; measured class 100 environment; microelectronics; microfabrication instructional laboratories; micromachining; optical table surface; Contamination; Costs; Floors; Laboratories; Optical design; Optical design techniques; Optical filters; Plastics; Pollution measurement; Tiles;
fLanguage
English
Journal_Title
Education, IEEE Transactions on
Publisher
ieee
ISSN
0018-9359
Type
jour
DOI
10.1109/13.762951
Filename
762951
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