Title :
Plasmoid formation and multiple steady states in a low pressure, inductively coupled electronegative plasma
Author :
Economou, Demeter J. ; Wise, Richard S. ; Kubota, Alison A.
Author_Institution :
Dept. of Chem. Eng., Houston Univ., TX, USA
fDate :
2/1/1999 12:00:00 AM
Abstract :
Hysteresis and multiple steady states have been observed in a low pressure inductively coupled plasma in chlorine gas. A bowl-shaped bright structure with sharply delineated edges (plasmoid) was found to form under the planar coil. A different plasma state with rather diffuse emission of lower intensity was also observed under the same operating conditions
Keywords :
chlorine; hysteresis; plasma diagnostics; plasma materials processing; plasma sheaths; sputter etching; Cl; Cl plasma; bowl-shaped bright structure; diffuse emission; double layers; hysteresis; low pressure inductively coupled electronegative plasma; low pressure inductively coupled plasma; multiple steady states; operating conditions; planar coil; plasma state; plasmoid; plasmoid formation; sharply delineated edges; Argon; Chemical engineering; Coils; Electrodes; Hysteresis; Inductors; Plasma applications; Plasma chemistry; Plasma density; Plasma materials processing;
Journal_Title :
Plasma Science, IEEE Transactions on
