Title :
Heating modes in capacitively coupled RF plasmas observed with emission spectroscopy
Author :
Mahony, C.M.O. ; Graham, W.G.
Author_Institution :
Dept. of Pure & Appl. Phys., Queen´´s Univ., Belfast, UK
fDate :
2/1/1999 12:00:00 AM
Abstract :
It is demonstrated that spatio-temporally resolved emission studies of a capacitively coupled gaseous electronics conference reference cell discharge can be used to determine changes in the heating mechanisms in such discharges
Keywords :
high-frequency discharges; plasma diagnostics; plasma radiofrequency heating; capacitively coupled RF plasmas; capacitively coupled gaseous electronics conference reference cell discharge; emission spectroscopy; heating mechanisms; heating modes; spatio-temporally resolved emission; Argon; Electrodes; Energy resolution; Heating; Image resolution; Plasma measurements; Radio frequency; Spatial resolution; Spectroscopy; Voltage;
Journal_Title :
Plasma Science, IEEE Transactions on
