Title :
Chaotic dynamics of three-dimensional DC magnetron discharge
Author :
Kondo, Shuji ; Nanbu, Kenichi
Author_Institution :
Inst. of Fluid Sci., Tohoku Univ., Sendai, Japan
fDate :
2/1/1999 12:00:00 AM
Abstract :
By the use of the particle-in-cell/Monte Carlo method, it is found that DC magnetron discharges show either of two patterns, real steady state and chaotic steady state. Which occurs depends on the discharge conditions. Here three-dimensional images of the chaotic steady state are illustrated
Keywords :
Monte Carlo methods; chaos; discharges (electric); magnetrons; plasma density; plasma instability; plasma simulation; chaotic dynamics; chaotic steady state; discharge conditions; instability; particle simulation; particle-in-cell/Monte Carlo method; real steady state; three-dimensional DC magnetron discharge; three-dimensional images; Argon; Cathodes; Chaos; Electrodes; Electrons; Magnets; Plasma simulation; Plasma waves; Sputtering; Steady-state;
Journal_Title :
Plasma Science, IEEE Transactions on
