Title :
Evolution of the two-dimensional axisymmetric charged particle density in a radio frequency planar magnetron via a PIC-MCC simulation
Author :
Minea, T.M. ; Bretagne, J. ; Gousset, G.
Author_Institution :
Lab. de Phys. des Gaz et des Plasmas, Univ. de Paris-Sud, Orsay, France
fDate :
2/1/1999 12:00:00 AM
Abstract :
A two-dimensional (2-D) time resolved PIC-MCC simulation implemented on a parallel machine is developed for the modeling of an RF planar magnetron discharge. Preliminary results of the self-consistent plasma model are presented. Instantaneous electron and ion 2-D density distributions are reported
Keywords :
high-frequency discharges; magnetrons; plasma density; plasma simulation; PIC-MCC simulation; RF planar magnetron discharge modelling; electron 2-D density distributions; ion 2-D density distributions; parallel machine; radio frequency planar magnetron; self-consistent plasma model; two-dimensional axisymmetric charged particle density; two-dimensional time resolved PIC-MCC simulation; unbalanced magnetron; Electrons; Magnetic devices; Magnetic fields; Plasma applications; Plasma density; Plasma devices; Plasma simulation; Radio frequency; Sputtering; Toroidal magnetic fields;
Journal_Title :
Plasma Science, IEEE Transactions on
