Title :
60-GHz Near-Field Six-Port Microscope Using a Scanning Slit Probe for Subsurface Sensing
Author :
Haddadi, Kamel ; Lasri, Tuami
Author_Institution :
Inst. d´´Electron., Univ. des Sci. et Technol. de Lille, Villeneuve d´´Ascq, France
Abstract :
A new six-port based near-field millimeter-wave microscope using a scanning slit probe is proposed for subsurface sensing applications. The combination of a six-port reflectometer and a slit probe presents a viable and promising alternative to the costly heterodyne principle. The system presents advantages such as compactness, robustness, and low cost. To evaluate its performance, the spatial resolution is experimentally verified.
Keywords :
millimetre waves; nondestructive testing; compactness; frequency 60 GHz; heterodyne principle; robustness; scanning slit probe; six-port based near-field millimeter-wave microscope; six-port reflectometer; subsurface sensing applications; Copper; Microscopy; Millimeter wave technology; Probes; Sensors; Spatial resolution; Substrates; Near-field millimeter-wave microscopy; six-port; slit probe; subsurface;
Journal_Title :
Sensors Journal, IEEE
DOI :
10.1109/JSEN.2012.2197197