• DocumentCode
    1505923
  • Title

    Impact of Lateral Asymmetric Channel Doping on 45-nm-Technology N-Type SOI MOSFETs

  • Author

    Nayfeh, Hasan M. ; Rovedo, Nivo ; Bryant, Andres ; Narasimha, Shreesh ; Kumar, Ajit ; Yu, Xiaojun ; Su, Ning ; Kumar, Ajit ; Sleight, Jeffrey W. ; Robison, Robert R. ; Rausch, Werner ; Mallela, Hari ; Freeman, Greg

  • Author_Institution
    Semicond. R&D Center, IBM, Hopewell Junction, NY, USA
  • Volume
    56
  • Issue
    12
  • fYear
    2009
  • Firstpage
    3097
  • Lastpage
    3105
  • Abstract
    Lateral asymmetric channel doping is applied to 45-nm technology NFET devices. The measured effective drain-current enhancement over coprocessed symmetric control devices is 10%. Analysis reveals that the dominant physical mechanism, which accounts for two-third of the total enhanced drain current, is an 8% increase in the source-side injection velocity. The remaining one-third is attributed to the decreased drain-induced barrier lowering. This paper concludes with an analysis of the switching characteristics of CMOS inverters composed of an asymmetric NFET and a companion symmetric PFET and shows a 5% improvement in the delay. The improvement is explained in terms of the increased velocity and 30% reduction in drain junction capacitance.
  • Keywords
    CMOS integrated circuits; MOSFET; invertors; silicon-on-insulator; CMOS inverters; N-type SOI MOSFET; asymmetric NFET; drain-current enhancement; lateral asymmetric channel doping; size 45 nm; source-side injection velocity; switching characteristics; symmetric PFET; Capacitance; Delay; Doping; Fabrication; Helium; Implants; Inverters; MOSFETs; Research and development; Silicon on insulator technology; Asymmetric MOSFET; MOSFET; deeply scaled CMOS; floating body; silicon on insulator (SOI);
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/TED.2009.2032750
  • Filename
    5291762