Title :
Special Section on the International Conference on Microelectronic Test Structures
Author :
Allen, Richard A.
Author_Institution :
NIST, Gaithersburg, MD, USA
fDate :
5/1/2012 12:00:00 AM
Abstract :
The seven papers in this special section were originally presented at the 2009 International Conference on Microelectronics Test Structures (ICMTS).
Keywords :
Meetings; Microelectronics; Special issues and sections; Testing;
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
DOI :
10.1109/TSM.2011.2181675
