Title :
Precise measurement of SAW velocity using SAW delay line
Author :
Nomura, Tooru ; Yasuda, Tsutomu ; Shiokawa, Showko ; Moriizumi, Toyosaka
Author_Institution :
Dept. of Electr. Commun., Shibaura Inst. of Technol., Tokyo, Japan
Abstract :
A method of nondestructive evaluation (NDE) by measuring the acoustic properties of materials using a surface-acoustic-wave (SAW) delay line is presented. A SAW delay line with three interdigital transducers (IDTs) deposited on a piezoelectric substrate is used to measure the SAW velocity of the sample material, using a fluid couplant. The SAW velocity is obtained from the frequency dependence of the delay line, and movement in the z-direction is not required. Measurements have been made for an anisotropic material at frequencies from 35 to 55 MHz. The experimental results agree well with the theoretical results. Moreover, it has been found that the focused SAW excited from a Fresnel-phase-plate IDT is suitable for mapping the two-dimensional variation of SAW velocity on an anisotropic sample surface.<>
Keywords :
delay lines; surface acoustic wave devices; ultrasonic velocity measurement; 35 to 55 MHz; Fresnel-phase-plate; IDTs; NDE; SAW delay line; SAW velocity; interdigital transducers; nondestructive evaluation; piezoelectric substrate; surface-acoustic-wave; Acoustic materials; Acoustic measurements; Acoustic transducers; Anisotropic magnetoresistance; Delay lines; Frequency dependence; Piezoelectric materials; Piezoelectric transducers; Surface acoustic waves; Velocity measurement;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
