Title :
XPS Study on Chemical State and Phase Structure of PBII Nitriding M50 Steel
Author :
Li, Zhongwen ; Tang, Guangze ; Ma, Xinxin ; Sun, Mingren ; Wang, Liqin
Author_Institution :
Sch. of Mater. Sci. & Eng., Harbin Inst. of Technol., Harbin, China
Abstract :
X-ray diffraction (XRD) and X-ray photoelectron spectroscopy were used to study the structure and the element chemical states of plasma-based ion implantation (PBII) nitriding M50 steel. An ~70-nm-thick oxygen-rich layer was formed in the surface after PBII treatment, where C and V elements were absent, Cr and Mo elements were in the manner of oxide, and Fe element was in the manner of Fe3O4 and iron nitride. XRD patterns revealed that the Fe16N2 phase was formed in the subsurface of the nitrided layer. Four different chemical states of nitrogen with binding energies of 404.1, 399.2, 396.7, and 394.3 eV were found in sequence with sputtering time increasing, which were confirmed to belong to NO bonding, Fe3(N, O) [or Fe4(NO)], Fe3N (or Fe4N), and Fe16N2.
Keywords :
X-ray diffraction; X-ray photoelectron spectra; binding energy; plasma immersion ion implantation; sputtering; steel; surface hardening; surface structure; FeCJk; M50 steel; PBII treatment; X-ray diffraction; X-ray photoelectron spectroscopy; XPS; binding energies; element chemical states; phase structure; plasma-based ion implantation nitriding treatment; sputtering; Chemical elements; Ion implantation; Iron; Plasma chemistry; Plasma immersion ion implantation; Plasma x-ray sources; Spectroscopy; Steel; X-ray diffraction; X-ray scattering; M50 steel; X-ray photoelectron spectrum (XPS); plasma-based ion implantation (PBII) nitriding;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2010.2050075