Micromachined magnetic actuators using electroplated Permalloy

Author

Liu, Chang ; Yi, Yong W.

Author_Institution

Microelectron. Lab., Illinois Univ., Urbana, IL, USA

Volume

35

Issue

3

fYear

1999

fDate

5/1/1999 12:00:00 AM

Firstpage

1976

Lastpage

1985

Abstract

Results on design, fabrication, and testing of silicon micromachined magnetic actuators are presented. Electroplated, low-stress Permalloy (Ni₈₀Fe₂₀) material is the medium for magnetic interaction and force generation. The Permalloy piece is supported by a structural plate, which consists of polycrystalline silicon thin film prepared by low-pressure chemical vapor deposition (LPCVD). Magnetic actuators supported both by cantilever beams and by torsional beams can provide large force (on the order of 100 μN) and large displacement (on the order of 100 μm). The vertical loading force of magnetic actuators under external bias has been experimentally determined. Applications of such actuators in magnetically assisted levitation and parallel assembly of three-dimensional structures are demonstrated

Keywords

Permalloy; electromagnetic actuators; electroplating; magnetic levitation; microactuators; micromachining; 100 micron; Ni₈₀Fe₂₀; cantilever beams; electroplated material; force generation; low-pressure chemical vapor deposition; magnetic interaction; magnetically assisted levitation; micromachined magnetic actuators; structural plate; three-dimensional structures; torsional beams; vertical loading force; Actuators; Fabrication; Iron; Magnetic levitation; Magnetic materials; Semiconductor thin films; Silicon; Structural beams; Structural plates; Testing;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/20.764895

Filename

764895