Title :
Capacitively Coupled Plasma With an Asymmetric Dielectric Plate
Author :
Kenney, Jason A. ; Rauf, Shahid ; Collins, Ken
Author_Institution :
Appl. Mater., Inc., Sunnyvale, CA, USA
Abstract :
A 3-D plasma model is used to investigate the impact of an azimuthally asymmetric quartz plate on a capacitively coupled discharge in an otherwise symmetric chamber. Large azimuthal nonuniformity in electron density arises due to electrical asymmetry. In addition, ion angular distributions show a linkage between azimuthal and radial angles in regions away from the symmetry plane.
Keywords :
electron density; plasma density; plasma simulation; surface discharges; 3D plasma model; SiO2; asymmetric dielectric plate; azimuthal angle; azimuthal nonuniformity; azimuthally asymmetric quartz plate; capacitively coupled discharge; capacitively coupled plasma; electrical asymmetry; electron density; ion angular distributions; radial angle; symmetric chamber; symmetry plane; Dielectrics; Electrodes; Inductors; Mathematical model; Plasmas; Radio frequency; Solid modeling; 3-D plasma simulation; Capacitively coupled;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2011.2132148
