DocumentCode :
1509098
Title :
IEEE copyright form
Volume :
24
Issue :
2
fYear :
2011
fDate :
5/1/2011 12:00:00 AM
Firstpage :
375
Lastpage :
376
Abstract :
Authors must enclose a signed copy of this form when submitting manuscripts to the Editor of this publication.
fLanguage :
English
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
Publisher :
ieee
ISSN :
0894-6507
Type :
jour
DOI :
10.1109/TSM.2011.2149152
Filename :
5762427
Link To Document :
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