Title :
Two magnetic phases in the co-sputtered Fe-Si3N4 thin film
Author :
Han, S.H. ; Yu, S.C. ; Kim, W.T. ; Han, S.H. ; Kim, W.T.
Author_Institution :
Dept. of Phys., Chung-Buk Nat. Univ., Cheongju, South Korea
fDate :
9/1/1997 12:00:00 AM
Abstract :
The structure and magnetic properties of Fe-Si3N4 thin films fabricated by a co-sputtering technique were studied by X-ray diffractometry and magnetometry. With increasing area fraction of Si3N4 pieces on the Fe target, magnetization of the films decreased due to reduced Fe content and reduced grain size of the bcc crystalline phase. The temperature dependence and field dependence of magnetization of co-sputtered thin films can be explained by a mixture of two types of particles showing paramagnetism and ferromagnetism
Keywords :
X-ray diffraction; ferromagnetic materials; grain size; granular materials; iron; magnetic particles; magnetisation; paramagnetic materials; silicon compounds; sputtered coatings; Fe target; Fe-Si3N4; Si3N4 pieces; X-ray diffractometry; bcc crystalline phase; co-sputtered Fe-Si3N4 thin film; co-sputtering technique; ferromagnetism; field dependence; granular films; increasing area fraction; magnetic properties; magnetization; magnetometry; metallic magnetic grains; paramagnetism; particles; reduced Fe content; reduced grain size; structure; temperature dependence; two magnetic phases; Crystallization; Grain size; Iron; Magnetic films; Magnetic properties; Magnetization; Semiconductor films; Temperature dependence; Transistors; X-ray diffraction;
Journal_Title :
Magnetics, IEEE Transactions on
