Study on S- and R-block construction with additional spinel blocks in sputter-deposited Ba ferrite films

Author

Noma, K. ; Matsushita, N. ; Nakagawa, S. ; Naoe, M.

Author_Institution

Dept. of Phys. Electron., Tokyo Inst. of Technol., Japan

Volume

33

Issue

5

fYear

1997

fDate

9/1/1997 12:00:00 AM

Firstpage

3637

Lastpage

3639

Abstract

Ba ferrite sputtered films deposited using the sputtering gas of Xe-Ar-O₂ exhibited large saturation magnetization 4πM_s and perpendicular anisotropy constant K_⊥ of 5.1 kG and 3.3×10⁵ J/m³, respectively. The results on plasma diagnosis and the dependences of interplanar distance and 4πM, on the substrate temperature T_s imply that a number of Fe²⁺ ions exist in the films. The crystal structure analysis by XRD suggests that the films contain Ba ferrite crystallites with additional S-blocks

Keywords

barium compounds; crystal microstructure; crystal structure; crystallites; ferrites; magnetic thin films; magnetisation; perpendicular magnetic anisotropy; sputter deposition; sputtered coatings; Ba ferrite crystallites; Ba ferrite sputtered films; BaFe₁₂O₁₉; Fe²⁺ ions; R-block construction; S-block construction; XRD; Xe-Ar-O₂; crystal structure; interplanar distance; large saturation magnetization; perpendicular anisotropy constant; plasma diagnosis; spinel blocks; sputter-deposited Ba ferrite films; sputtering gas; substrate temperature; Anisotropic magnetoresistance; Crystallization; Ferrite films; Iron; Plasma diagnostics; Plasma temperature; Saturation magnetization; Sputtering; Temperature dependence; X-ray scattering;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/20.619522

Filename

619522