Title :
Improvement of soft magnetic properties of ferromagnetic Fe-Co-Ta:N/M films multilayered with paramagnetic Ti, Co67Cr 33 and Fe82Co9Ta9:N interlayers
Author :
Nakagawa, Shigeki ; Suemitsu, Katsumi ; Naoe, Masahiko
Author_Institution :
Dept. of Phys. Electron., Tokyo Inst. of Technol., Japan
fDate :
9/1/1997 12:00:00 AM
Abstract :
[Fe-Co-Ta:N/paramagnetic layer] multilayers were deposited using a facing targets sputtering apparatus. Soft magnetic properties were optimized by adjusting the N content in paramagnetic interlayers of Ti, Co67Cr33 Fe82Co9Ta9 :N. The addition of a small amount of N atoms into the Ti interlayer was effective in maintaining a relatively high μr even after annealing at 280°C. Fe82Co9Ta9:N/Ti-N multilayers revealed soft magnetic properties before and after the annealing process
Keywords :
annealing; chromium alloys; cobalt alloys; ferromagnetic materials; iron alloys; magnetic multilayers; magnetic permeability; nitrogen; paramagnetic materials; soft magnetic materials; sputtered coatings; tantalum alloys; titanium; 280 degC; Co67Cr33; Co67Cr33 interlayers; Fe-Co-Ta:N; Fe82Co9Ta9:N; Fe82Co9Ta9:N interlayers; N content; Ti; annealing; facing targets sputtering apparatus; ferromagnetic Fe-Co-Ta:N/M films; multilayered films; paramagnetic Ti; soft magnetic properties; Annealing; Magnetic cores; Magnetic films; Magnetic multilayers; Magnetic properties; Paramagnetic materials; Permeability; Saturation magnetization; Sputtering; Temperature;
Journal_Title :
Magnetics, IEEE Transactions on
