• DocumentCode
    1509616
  • Title

    Improvement of soft magnetic properties of ferromagnetic Fe-Co-Ta:N/M films multilayered with paramagnetic Ti, Co67Cr 33 and Fe82Co9Ta9:N interlayers

  • Author

    Nakagawa, Shigeki ; Suemitsu, Katsumi ; Naoe, Masahiko

  • Author_Institution
    Dept. of Phys. Electron., Tokyo Inst. of Technol., Japan
  • Volume
    33
  • Issue
    5
  • fYear
    1997
  • fDate
    9/1/1997 12:00:00 AM
  • Firstpage
    3805
  • Lastpage
    3807
  • Abstract
    [Fe-Co-Ta:N/paramagnetic layer] multilayers were deposited using a facing targets sputtering apparatus. Soft magnetic properties were optimized by adjusting the N content in paramagnetic interlayers of Ti, Co67Cr33 Fe82Co9Ta9 :N. The addition of a small amount of N atoms into the Ti interlayer was effective in maintaining a relatively high μr even after annealing at 280°C. Fe82Co9Ta9:N/Ti-N multilayers revealed soft magnetic properties before and after the annealing process
  • Keywords
    annealing; chromium alloys; cobalt alloys; ferromagnetic materials; iron alloys; magnetic multilayers; magnetic permeability; nitrogen; paramagnetic materials; soft magnetic materials; sputtered coatings; tantalum alloys; titanium; 280 degC; Co67Cr33; Co67Cr33 interlayers; Fe-Co-Ta:N; Fe82Co9Ta9:N; Fe82Co9Ta9:N interlayers; N content; Ti; annealing; facing targets sputtering apparatus; ferromagnetic Fe-Co-Ta:N/M films; multilayered films; paramagnetic Ti; soft magnetic properties; Annealing; Magnetic cores; Magnetic films; Magnetic multilayers; Magnetic properties; Paramagnetic materials; Permeability; Saturation magnetization; Sputtering; Temperature;
  • fLanguage
    English
  • Journal_Title
    Magnetics, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9464
  • Type

    jour

  • DOI
    10.1109/20.619577
  • Filename
    619577
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1509616