DocumentCode :
1509995
Title :
Thick film resistors for AlN ceramics
Author :
Kurihara, Yasutoshi ; Takahashi, Shigeru ; Yamada, Kazuji ; Endoh, Tsuneo ; Kanai, Kiyoshi
Author_Institution :
Hitachi Ltd., Ibaraki, Japan
Volume :
14
Issue :
1
fYear :
1991
fDate :
3/1/1991 12:00:00 AM
Firstpage :
199
Lastpage :
203
Abstract :
RuO2 thick-film resistors for aluminum nitride (AlN) ceramics with controlled temperature coefficient of the resistor (TCR) and reliabilities have been developed. The resistors, in the range of approximately 10 Ω/□ to 10 kΩ/□ were obtained using a crystallized glass powder and a RuO2 powder, binder materials, and a conducting material. The glass had a low PbO content of 6 wt %, a low thermal expansion coefficient of 3.6×10-6/°C, and a softening point of 610°C. The resistors, to which MnO2 was added to the above combination, had excellent TCRs of ±250 p.p.m./°C at 30 Ω/□ to 30 kΩ/□. These resistors showed small resistance changes, which were less than +1.0% after a thermal cycle test (-55-150°C, 1000 times) and high-temperature storage test, ( 150°C, 1000 h). They had excellent resistance stability. Further, the effect of particle size of glass and RuO2 powders on electrical properties of the resistors containing the crystallized glass was similar to that in resistors containing noncrystallized glass for alumina ceramics
Keywords :
aluminium compounds; ceramics; environmental testing; materials testing; ruthenium compounds; stability; substrates; thick film resistors; -55 to 150 C; AlN ceramics; RuO2 powder; RuO2 thick-film resistors; TCE; TCR; binder materials; conducting material; controlled temperature coefficient; crystallized glass powder; electrical properties; high-temperature storage test; particle size; resistance stability; sheet resistivity; softening point; thermal cycle test; thermal expansion coefficient; Ceramics; Conducting materials; Crystallization; Electric resistance; Glass; Powders; Resistors; Testing; Thermal resistance; Thick films;
fLanguage :
English
Journal_Title :
Components, Hybrids, and Manufacturing Technology, IEEE Transactions on
Publisher :
ieee
ISSN :
0148-6411
Type :
jour
DOI :
10.1109/33.76532
Filename :
76532
Link To Document :
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